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• IEUVI Home  • IEUVI Objectives  • Meetings*  • TWG * Need access? Send mail to Paolo Gargini IEUVI Special Topic & Panel Discussion September 10, 2017 1 Agenda by Paolo Gargini, Standford University 2 Roadmap evolution: From NTRS to ITRS, from ITRS 2.0 to IRDS by Paolo Gargini, Standford University 3 Lithography status and IMEC view on 3D-enabled scaling by Greg McIntyre, IMEC 4 3D scaling through deposition and etch by Uday Mitra, Applied Materials 5 Nanodevices for monolithic 3D: The 'DREAMERS' by Jeffrey Bokor, UC Berkeley 6 High lithographic resolution & 3D: the 3D memory is the important part by Erik P. DeBenedictis, Sandia National Laboratories