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Paolo Gargini
IEUVI
Special Topic & Panel Discussion
September 10, 2017
1 Agenda
by Paolo Gargini, Standford University
2 Roadmap evolution: From NTRS to ITRS, from ITRS 2.0 to IRDS
by Paolo Gargini, Standford University
3 Lithography status and IMEC view on 3D-enabled scaling
by Greg McIntyre, IMEC
4 3D scaling through deposition and etch
by Uday Mitra, Applied Materials
5 Nanodevices for monolithic 3D: The 'DREAMERS'
by Jeffrey Bokor, UC Berkeley
6 High lithographic resolution & 3D: the 3D memory is the important part
by Erik P. DeBenedictis, Sandia National Laboratories