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IEUVI TWGs
Welcome to the TWGs Member Section - This section is now open to the public.
- Optics Contamination and Lifetime
-TWG Chair Contact:
Andrea Wüest, SEMATECH
-Co-chairs: Asia/Pacific: Yasuaki Fukuda, EUVA/Canon; Europe: Rogier Verberk, TNO; USA: Thomas Lucatorto, NIST
- Mask
-TWG Co-Chairs: David Chan, SEMATECH; George Huang, UMC assignee to SEMATECH
-Regional Co-Chairs: Japan, Osamu Suga, ASET;
Korea, Jinho Ahn, Hayang University;
Europe, Jan-Hendrik Peters, AMTC
- Resist
-TWG Chair Contacts:
Jacque Georger;
Serge Tedesco
- Source
-TWG Chair Contact:
Frank Goodwin, SEMATECH
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